发明名称 LIGHT MODULATOR TYPE MULTI-BEAM SCANNING APPARATUS USING DICHROIC SLIT
摘要 Disclosed herein is a light modulator type multi-beam scanning apparatus using a dichroic slit. The scanning apparatus includes a first lens unit, a plurality of light modulators, a focusing unit, a second lens unit and a third lens unit. The first lens unit converts a plurality of beams of light into collimated beams, respectively, and outputs the collimated beams. The light modulators modulate the collimated beams into diffracted beams having a plurality of diffraction orders. The focusing unit forms a multi-diffracted beam by focusing the diffracted beams having the plurality of diffraction orders. The second lens unit separates the multi-diffracted beam into separate diffracted beams according to diffraction orders. The dichroic slit selectively transmits some of the separate diffracted beams having one or more predetermined diffraction orders. The third lens unit projects the sum of the separate beams onto an object.
申请公布号 US2006039053(A1) 申请公布日期 2006.02.23
申请号 US20040952378 申请日期 2004.09.28
申请人 YANG HAENG-SEOK;YUN SANG KYEONG 发明人 YANG HAENG-SEOK;YUN SANG KYEONG
分类号 G02B26/08 主分类号 G02B26/08
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