发明名称 Apparatus and methods for wafer-level testing of the chip-scale semiconductor device packages
摘要 A test chuck is configured for assembly with, and to test, semiconductor devices of a large-scale substrate. The test chuck includes a substrate with terminals that are arranged correspondingly to the arrangement of bond pads or other contacts of the semiconductor devices, which have yet to be singulated from the large-scale substrate. The test chuck may be part of a larger wafer-scale testing system, which includes test circuits for testing or stressing the semiconductor devices of a large-scale substrate, as well as features, such as a receptacle, for establishing communication between the test circuits and the terminals of the test chuck. Additionally, such a system may include one or more elements, such as a biasing element, for facilitating communication between terminals of the test chuck and corresponding contacts of the large-scale substrate. Methods for testing or stressing semiconductor devices are also disclosed.
申请公布号 US2006038172(A1) 申请公布日期 2006.02.23
申请号 US20050249538 申请日期 2005.10.13
申请人 AKRAM SALMAN 发明人 AKRAM SALMAN
分类号 G01R31/26;G01R1/073;H01L21/60;H01L21/768;H01L23/14;H01L23/31;H01L23/498 主分类号 G01R31/26
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