| 发明名称 |
SYSTEM AND METHOD FOR PROXIMITY EFFECT CORRECTION IN IMAGING SYSTEMS |
| 摘要 |
A system and method are disclosed for providing error correction in an imaging system. The system includes an error determination unit for determining an amount of error associated with a spot at (x,y) in a binary pattern to be imaged, a determination unit for determining the location of a nearest exposed spot at (x<SUB>1</SUB>, y,) for each spot at (x,y), and a dose modification unit for modifying an exposure d. |
| 申请公布号 |
WO2006019416(A2) |
申请公布日期 |
2006.02.23 |
| 申请号 |
WO2005US08250 |
申请日期 |
2005.03.11 |
| 申请人 |
MASSACHUSETTS INSTITUTE OF TECHNOLOGY;MENON, RAJESH;GIL, DARIO;BARBASTATHIS, GEORGE;SMITH, HENRY, I. |
发明人 |
MENON, RAJESH;GIL, DARIO;BARBASTATHIS, GEORGE;SMITH, HENRY, I. |
| 分类号 |
G03F7/20;G03F1/14;H01J37/304 |
主分类号 |
G03F7/20 |
| 代理机构 |
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