摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma igniter and a device loading the same irradiating electron with high energy promoting gas ionization in the air, lowering breakdown voltage of a discharge device, and generating spatially uniform discharge. <P>SOLUTION: The plasma igniter 3 comprises an electron drift layer 5 formed on a semiconducting or conductive substrate 4 generating hot electron, quasi-ballistic electron, or ballistic electron, and a surface electrode 6 formed on the electron drift layer 5, and is loaded on an atmospheric pressure plasma treatment device. <P>COPYRIGHT: (C)2006,JPO&NCIPI |