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发明名称
METHOD FOR ANALYZING CONTACT IN SEMICONDUCTOR DEVICE
摘要
申请公布号
KR20060017393(A)
申请公布日期
2006.02.23
申请号
KR20040066050
申请日期
2004.08.20
申请人
DONGBUANAM SEMICONDUCTOR INC.
发明人
JEONG, YUN JEONG
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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