发明名称 MAGNET UNIT, LINEAR MOTOR, STAGE DEVICE, AND EXPOSURE APPARATUS, AND MANUFACTURING METHOD OF MAGNET UNIT
摘要 <P>PROBLEM TO BE SOLVED: To provide a linear motor comprising magnet units, the productivity of which can be improved and the thrust force fluctuation of which can be suppressed. <P>SOLUTION: The linear motor is provided with a stator 11 comprising the magnet units. The stator 11 has first and second magnet members 13, 15. The base materials 13B, 15B that constitute the first and second magnet members 13, 15 have first and second surfaces 17, 19 that extend in Y-axis direction. On the first and second surfaces 17, 19 are provided side by side in the Y-axis direction a plurality of magnetizing areas magnetized to N pole or S pole. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006054966(A) 申请公布日期 2006.02.23
申请号 JP20040235157 申请日期 2004.08.12
申请人 NIKON CORP 发明人 TOTSU MASAHIRO
分类号 H02K41/03;G03F7/20;H01L21/027;H01L21/68 主分类号 H02K41/03
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