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发明名称
VORRICHTUNG UND VERFAHREN ZUR KÜHLUNG VON IN EINER IONENIMPLANTATIONSANLAGE BEHANDELTEN WERKSTÜCKEN
摘要
申请公布号
DE69730818(T2)
申请公布日期
2006.02.23
申请号
DE19976030818T
申请日期
1997.02.14
申请人
AXCELIS TECHNOLOGIES, INC.
发明人
BRAILOVE, A.;ROSE, H.;BLAKE, G.;YANG, ZHONGMIN;PURSER, H.
分类号
H01J27/14;H01J37/08;H01J37/18;H01J37/30;H01J37/304;H01J37/317;H01L21/00;H01L21/677;H01L21/683
主分类号
H01J27/14
代理机构
代理人
主权项
地址
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