PIXEL STRUCTURE OF THIN FILM TRANSISTOR-LIQUID CRYSTAL DISPLAY (TFT-LCD) AND FABRICATION METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a pixel structure of a TFT-LCD formed in four mask steps and to provide a fabrication method of the pixel structure.

SOLUTION: A transparent conductive layer and a first metallic layer are sequentially formed over a substrate. The first metallic layer and the transparent conductive layer are patterned to form a gate pattern and a pixel electrode pattern. A gate insulating layer and a semiconductor layer are sequentially formed over the substrate. A patterning process is performed to remove the first metallic layer in the pixel electrode pattern while keeping the gate insulating layer and the semiconductor layer over the gate pattern. A second metallic layer is formed over the substrate. The second metallic layer is patterned to form a source pattern and a drain pattern over the semiconductor layer. In a final step, a passivation layer is formed over the substrate and is patterned to expose the transparent conductive layer in the pixel electrode pattern.

COPYRIGHT: (C)2006,JPO&NCIPI