摘要 |
PROBLEM TO BE SOLVED: To provide an optical characteristic variable optical element whose power consumption is reduced, whose noise is reduced, whose response time is shortened, and whose mechanical structure is simplified, and then, which contribute to the reduction of the cost, and to provide an optical apparatus including the optical element. SOLUTION: The optical element is provided with a deformable substrate 709j, a thin reflection film 709a arranged on the substrate and an electrode 709k arranged on the substrate, and the peripheral part of the substrate is fixed to frames 723 and 724, and a fixed electrode 709b is arranged on the frames, and by applying a voltage between the fixed electrode and the electrode arranged on the substrate, the substrate is deformed, and then, the substrate comes in contact with the fixed electrode, then, the thin reflection film is shifted or tilted. COPYRIGHT: (C)2006,JPO&NCIPI
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