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发明名称
VORRICHTUNG ZUR ERZEUGUNG VON IONENSTRAHLEN
摘要
申请公布号
DE69923979(T2)
申请公布日期
2006.02.23
申请号
DE19996023979T
申请日期
1999.06.23
申请人
APPLIED MATERIALS, INC.
发明人
MURRELL, JOHN;COLLART, JAN;HARRISON, FRANCIS;AL-BAYATI, AMIR;BURGESS, CHRIS JAMES SYDNEY;ARMOUR, DAVID;HOLMES, ANDREW;POVALL, SIMON;ARNOLD, DREW;BURFIELD, PAUL ANTHONY
分类号
C23C14/46;H01J27/02;H01J37/08;H01L21/265
主分类号
C23C14/46
代理机构
代理人
主权项
地址
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