INSPECTION METHOD AND APPARATUS OF CHEMICAL COATING FILM

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for inspecting a chemical coating film that can inspect the quality of a coating film on-line even for a thin film that cannot be visually evaluated easily and a chemical coating film having a small amount of deposit. SOLUTION: The inspection apparatus of the chemical coating film comprises a photoirradiation means 301 for irradiating the chemical coating film 100 to be inspected with light; a light receiving means 302 for receiving reflection light from the chemical coating film; a light reflection factor computing means 303 for calculating a light reflection factor by comparing the quantity of light emitted from the photoirradiation means with that received by the light receiving means; a storage means 304 for storing the relationship between the light reflection factor of the chemical coating film that is measured in advance with the amount of deposit; and a quality determining means 305 for determining the quality of the chemical coating film from the light reflection factor obtained by the light reflection factor computing means by referring to the relationship between the light reflection factor of the chemical coating film stored in a storage means and the amount of deposit. COPYRIGHT: (C)2006,JPO&NCIPI