| 摘要 |
PROBLEM TO BE SOLVED: To provide a radiation detector for preventing defects, etc. in a phosphor protection layer and suppressing the development of image defects. SOLUTION: This radiation detector comprises a sensor panel 100, a phosphor layer 111 for converting radiation formed on the sensor panel 100 into light, and a phosphor protection member 110 for covering the phosphor layer 111 while sticking fast to a substrate. The protection member 110 comprises the phosphor protection layer 116 made of vapor deposition polymeric polyimide formed by vapor deposition polymerization, a reflection layer 113 for reflecting light obtained through the conversion performed by the phosphor layer 111, and a reflection-layer protection layer 117 made of vapor deposition polymeric polyuria formed by vapor deposition polymerization. The polymerization reaction of the protection layer 116 performed by vapor deposition polymerization on the substrate, suppresses by-product material to facilitate the acquisition of homogeneity of film quality. This can suppress a situation in which structural disturbance occurs on a reflection surface of the reflection layer 113 to bring about image defects. COPYRIGHT: (C)2006,JPO&NCIPI
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