| 发明名称 |
Pellicle and method for manufacture thereof |
| 摘要 |
It is characterized by having a pellicle sheet made of a synthetic quartz glass having an OH group concentration of at most 100 ppm and containing substantially no oxygen deficient defect. It is particularly preferred that the OH group concentration is at most 10 ppm, and the internal transmittance is at least 80%/cm at a wavelength of 157 nm.
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| 申请公布号 |
US6475575(B1) |
申请公布日期 |
2002.11.05 |
| 申请号 |
US20010831360 |
申请日期 |
2001.08.06 |
| 申请人 |
ASAHI GLASS COMPANY, LIMITED |
发明人 |
IKUTA YOSHIAKI;KIKUGAWA SHINYA;MISHIRO HITOSHI;ARISHIMA HIROSHI;OKADA KANAME;MATSUMOTO KATSUHIRO |
| 分类号 |
C03B33/08;G03F1/14;G03F1/62;(IPC1-7):A47G1/12 |
主分类号 |
C03B33/08 |
| 代理机构 |
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代理人 |
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