SEMICONDUCTOR MANUFACTURING EQUIPMENT,申请号KR20040065227-传众专利搜索

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发明名称	SEMICONDUCTOR MANUFACTURING EQUIPMENT
摘要
申请公布号	KR20060016703(A)	申请公布日期	2006.02.22
申请号	KR20040065227	申请日期	2004.08.18
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	PARK, BONG JIN
分类号	H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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