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发明名称
METHOD OF CLEANING SEMICONDUCTOR DEVICE
摘要
申请公布号
KR20060016631(A)
申请公布日期
2006.02.22
申请号
KR20040065144
申请日期
2004.08.18
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
LEE, HYO SAN;KO, HYUNG HO;HONG, CHANG KI;HAN, JEONG NAM;MUN, CHANG SUP;CHOI, SANG JUN
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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