发明名称 |
Vacuum-cavity MEMS resonator |
摘要 |
A microelectromechanical (MEMS) resonator with a vacuum-cavity is fabricated using polysilicon-enabled release methods. A vacuum-cavity surrounding the MEMS beam is formed by removing release material that surrounds the beam and sealing the resulting cavity under vacuum by depositing a layer of nitride over the structure. The vacuum-cavity MEMS resonators have cantilever beams, bridge beams or breathing-bar beams.
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申请公布号 |
US7002436(B2) |
申请公布日期 |
2006.02.21 |
申请号 |
US20040921383 |
申请日期 |
2004.08.19 |
申请人 |
INTEL CORPORATION |
发明人 |
MA QING;CHENG PENG;RAO VALLURI |
分类号 |
H03H9/10;B81B7/00;H03H3/007;H03H9/24;H03H9/46 |
主分类号 |
H03H9/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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