| 摘要 |
PROBLEM TO BE SOLVED: To provide a chemical solution valve capable of reducing a liquid accumulation part and a leakage part. SOLUTION: In this chemical solution valve having a first port 4, a second port 5 and a common port 3 formed on a body 2A with a first diaphragm valve 6A mounted on the body 2A connected with the first port 4 and the common port 3, and a second diaphragm valve 6B mounted on the body 2A connected with the second port 5 and the common port 3, a first valve chest 25 of the first diaphragm valve 6A and a second valve chest 26 of the second diaphragm valve 6B are connected by a V-shaped flow channel 33. COPYRIGHT: (C)2006,JPO&NCIPI
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