| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent contamination in a next step caused by a step omission or the like between steps of different contamination classes. <P>SOLUTION: In accordance with completion of processing in a step 20a corresponding to a previous step between steps 20a and 20b of different contamination classes, the ID of a conveyer container 50 for conveying a semiconductor wafer 40a as an object to be processed after the end of processing to the next step is changed. In the step 20b as the next step, the changed ID serving as an identifier imparted in accordance with the end of the previous step is confirmed on software on a host computer 10a, so that it is confirmed that the previous processing step is not omitted and acceptance in the next step is made suitable. Thus, even if the previous processing step is omitted, acceptance in the next step can be surely refused, thereby eliminating danger that the situation of contamination relating to no processing of previous processing may be carried into the next step. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
