| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma ion source suitable for manufacturing metal-containing carbon cluster. <P>SOLUTION: In the plasma ion source, element to be contained is made to contact with a metal electrode at a high temperature in the vacuum vessel (ion chamber) to be ionized. Thermoelectrons generated from high-temperature portions are accelerated and made to collide with neutral elements which are not ionized, in spite of contacting to increase ionization ratio. The ion chamber has an ion extraction electrode portion, in which the charged ions are extracted from the plasma produced in the ion chamber to be provided as an ion beam to a containing process portion requiring the ions. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
