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发明名称
具有中空纤维之研磨垫及其制造方法
摘要
本发明系关于一种具有中空纤维之研磨垫及其制造方法,该研磨垫包括一本体及复数条中空纤维。该本体具有一研磨表面。该等中空纤维系位于该本体内且开口于该研磨表面,其中每一中空纤维之截面之中空面积大于一研磨浆液之研磨粒子之截面积。藉此,研磨浆液及研磨粒子可经由该等中空纤维在该研磨垫上达到全面流通。
申请公布号
TW200812750
申请公布日期
2008.03.16
申请号
TW095133296
申请日期
2006.09.08
申请人
三芳化学工业股份有限公司
发明人
冯崇智;姚伊蓬;蔡超元
分类号
B24B37/04(2006.01);B24D3/00(2006.01);H01L21/304(2006.01)
主分类号
B24B37/04(2006.01)
代理机构
代理人
陈长文
主权项
地址
高雄县仁武乡凤仁路402号
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