METHOD FOR GENERATING LIGHT ELEMENT CHARACTERISTIC X RAY FROM INSULATOR BY LOW ENERGY ION IRRADIATION

摘要

PROBLEM TO BE SOLVED: To provide a new method for generating light element characteristic X rays capable of efficiently generating the characteristic X rays of light elements with compact and low cost equipment. SOLUTION: Positive ions having low energy of 2 to 100 keV is cast on an insulator material target containing light element so that the characteristic X rays of light elment contained in insulator material target is generated in the light element characteristic X-ray generation method. COPYRIGHT: (C)2006,JPO&NCIPI