| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic driver in which moving speed of a mover can be prevented from lowering by preventing the end of the mover from being caught by a stator having a drive electrode when the mover is moving and reducing pneumatic resistance. SOLUTION: An edge of a mover 14 in the moving direction is formed such that an edge of a triangular portion 14b directing the moving direction of the mover 14 becomes acute against the moving direction of the mover 14, and also becomes acute against a stator 11 provided with a drive electrode 12. COPYRIGHT: (C)2006,JPO&NCIPI
|
