| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic eliminator which is applied for a transfer mechanism that transfers a transporting object with no conductivity and has no conductivity and easily accumulates static electricity, for example, low temperature polysilicon annealing equipment operated in a high temperature environment in an LED manufacturing factory. SOLUTION: The electrostatic eliminator 2 comprises a conductive axis rod 31, a conductive elastic body 34 connected to the rod, a conductive (mercury) rotary connector 36, and a lead wire 38, and grounding is made through a conductive route formed by these. Thereby, even if friction is generated between the conductive axis rod 31 and the transporting object, static electricity is led to a grounding end GND through the conductive route. COPYRIGHT: (C)2006,JPO&NCIPI
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