| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical delay apparatus that makes fast and recurring variable delay quantity possible by using a MEMS scanner. SOLUTION: The optical delay apparatus includes a lens 7 that converts incident light from an optical path passing the own focus into parallel light, a reflector 8 that reflects to the lens 7 the parallel light emitted from the lens 7 so as to make it pass through the original optical path, a rotary body 35 that is provided with a reflection area 41 and rotatable around the center axis, and a rotary body driving means 50. The incident light made incident to a part a prescribed distance away from the center axis line is reflected to the lens 7 on the reflection area 41 of the rotary body 35. The reflected light, after converted to the parallel light by the lens 7, is reflected by the reflector 8, passed through the lens 7 again, made incident on the reflection area 41 through the original optical path, and reflected. In order that, by this reflection, the delay quantity of the outgoing light from the reflection area 41 relative to the incident light may become a desired value, there is provided a MEMS scanner 60 which varies the angle of the reflection area 41 of the rotary body 35 through the rotary body driving means 50. COPYRIGHT: (C)2006,JPO&NCIPI
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