| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method for coating easily and safely electronic circuit substrate with the coating liquid of humidity curing type at a low cost. SOLUTION: The apparatus 100 for coating the electronic circuit substrate (omitted to be shown) with the coating liquid 1 of the humidity curing type includes: a liquid tank 10 for holding the coating liquid 1 and dipping the electronic circuit substrate in the coating liquid 1; and a dry gas diffusing means 20 held in the liquid tank 10 and having a diffusing port 20f above the liquid surface of the coating liquid 1. COPYRIGHT: (C)2006,JPO&NCIPI
|
