| 摘要 |
PROBLEM TO BE SOLVED: To provide an organic EL element which can prevent short circuit due to re-deposition of processing strips of an electrode generated at separation of the upper electrode by a laser machining, and its manufacturing method. SOLUTION: The organic EL element has a fluorinated film formed at a portion on the surface of the upper electrode which is at least laser machined. The manufacturing method of the organic EL element includes a process in which the machining strips generated at the time of laser machining are adsorbed electrostatically by a charged body and collected. The intermediate manufactured product of the organic EL element has a short circuit pattern formed for short-circuiting the upper electrode and the lower electrode. COPYRIGHT: (C)2006,JPO&NCIPI
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