| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing an AT-cut crystal resonator which performs thickness-shear vibration, in which a vibrating section of a crystal thin blank plate and a reinforcing section of a thick crystal blank plate for surrounding the periphery thereof are integrated. <P>SOLUTION: In the method of manufacturing the AT-cut crystal resonator which performs thickness-shear vibration, in which a vibrating section of a crystal thin blank plate and a reinforcing section of a thick crystal blank plate for surrounding the periphery thereof are integrated, the method has a process of patterning for forming a vibrating surface, processes of etching for outer shape, and forming the vibrating surface, a process of peeling a protective film, and a process of forming an etchant stopping segment section. The width of the etchant stopping segment section is 200μm-300μm, and the etchant stopping segment section is formed of a water-repellent resist. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
