| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid ejecting head which can precisely eject small liquid droplets without the generation of scum at an ejection opening, and to provide its manufacturing method. SOLUTION: The manufacturing method for the liquid ejecting head includes the process of setting a solid layer 3 for forming a passage on a substrate 1 where an energy generating element 2 is disposed, the process of forming a coating layer 4 for coating the solid layer on the substrate where the solid layer is set, the process of forming by the photolithography process the ejection opening 7 for ejecting a liquid in the coating layer formed on the solid layer, and the process of forming the energy generating element and the passage which communicates with the ejection opening by removing the solid layer. A material for forming the coating layer includes a cationic polymerizing compound, a photocationic polymerization initiator and a photocationic polymerization inhibitor. A material for forming a boundary to a point of the solid layer where the ejection opening in the coating layer is formed includes a copolymer of methacrylic anhydride and methacrylic ester. The liquid ejecting head is manufactured by the method. COPYRIGHT: (C)2006,JPO&NCIPI
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