| 摘要 |
An exposure apparatus for exposing a substrate to a light pulse via a mask. The apparatus includes an array of photoelectric converters to detect the light pulse, and a read circuit to read electrical signals from the array. The read circuit reads electrical signals from a part of the photoelectric converters sequentially switched with respect to each time interval between a successive two of the light pulses thereby to obtain cumulative electrical signals corresponding to a plurality of the light pulses.
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