| 摘要 |
PROBLEM TO BE SOLVED: To realize a pressure detector having improved detection accuracy of pressure, in a package for the pressure detector and the pressure detector. SOLUTION: This package for the pressure detector has a ceramic substrate 1 having a first metalized electrode 7 on the surface; a ceramic diaphragm 2 having a second metalized electrode 8 facing the first metalized electrode 7, disposed to the ceramic substrate 1; and a wiring electrical conductor 5 formed in the ceramic substrate 1, and connected with electrodes of a semiconductor element 3 for detecting the pressure applied to the ceramic diaphragm 2, on the basis of electrostatic capacity formed by the first metalized electrode 7 and the second metalized electrode 8. The ceramic substrate 1 and the ceramic diaphragm 2 are sintered and integrated. COPYRIGHT: (C)2006,JPO&NCIPI
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