| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluid control device of high reliability and durability capable of returning a valve to an initial state without operating an external pump and forming a purge line. SOLUTION: This fluid control device comprises the valve for controlling the flow of fluid. A first flow channel 101, a second flow channel 102, the valve 103 positioned between the first and second flow channels, and having a movable member 105 for blocking the flow by closing the first flow channel when the fluid flows from the second flow channel to the first flow channel, and a heat generating element 104 mounted on the first flow channel to change the valve from the close state to an open state, are provided. COPYRIGHT: (C)2006,JPO&NCIPI
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