发明名称 Methods of forming output prediction logic circuits with ultra-thin vertical transistors
摘要 Very fast integrated OPL circuits, such as pseudo-NMOS OPL and dynamic OPL, comprising CMOS gate arrays having ultra-thin vertical NMOS transistors are disclosed. The ultra-thin vertical NMOS transistors of the CMOS gate arrays are formed with relaxed silicon germanium (SiGe) body regions with graded germanium content and strained silicon channels.
申请公布号 US6998311(B2) 申请公布日期 2006.02.14
申请号 US20040759107 申请日期 2004.01.20
申请人 MICRON TECHNOLOGY, INC. 发明人 FORBES LEONARD;AHN KIE Y.
分类号 H01L21/336;H01L21/8238;H01L27/092;H01L27/118;H01L29/76;H01L31/117 主分类号 H01L21/336
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