发明名称 Semiconductor device having capacitor and method of manufacturing the same
摘要 A semiconductor device, comprising a first wiring formed in a first insulating film, a second insulating film formed on the first insulating film, a first electrode film selectively formed on the second insulating film, a third insulating film formed on the first electrode film, and having an end portion and a central portion, wherein the end portion has a thickness thinner than the central portion, a second electrode film formed on the central portion of the third insulating film such that the second electrode film faces the first electrode film.
申请公布号 US6998663(B2) 申请公布日期 2006.02.14
申请号 US20040770489 申请日期 2004.02.04
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 YOSHITOMI TAKASHI;MATSUMOTO MASAHIKO
分类号 H01L27/04;H01L27/108;H01L21/02;H01L21/822;H01L27/10;H01L29/76;H01L29/94;H01L31/119 主分类号 H01L27/04
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