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发明名称
THIN-FILM DEPOSITION APPARATUS
摘要
申请公布号
KR20060013876(A)
申请公布日期
2006.02.14
申请号
KR20040062487
申请日期
2004.08.09
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, YOUNG DO
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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