发明名称 Surface emission laser and manufacturing method for surface emission laser, light reception element and manufacturing method for light reception element, and optical transceiver module
摘要 The invention provides a surface emission laser which can be operated with low-current drive, and a manufacturing method therefor. The invention also provides a light reception element which provides high-speed modulation, and a manufacturing method therefor. The invention also provides an optical transceiver module which provides enhanced optical connection efficiency. An opening portion from the other surface side of the semiconductor substrate to the end portion on the semiconductor substrate side of the light emission portion is formed on the semiconductor substrate of the surface emission laser, and a lens made of a transparent resin is formed through the use of the side surface of the opening portion. An opening portion from the other surface side of the semiconductor substrate to the end portion on the semiconductor substrate side of the light reception portion is formed on the semiconductor substrate of the photodiode, and a lens 6 made of a transparent resin is formed through the use of the side surface of the opening portion. The lens formed on the light emission portion of the aforementioned surface emission laser and the lens formed on the light reception portion of the photodiode are placed facing each other without an optical waveguide therebetween.
申请公布号 US6999493(B2) 申请公布日期 2006.02.14
申请号 US20020152848 申请日期 2002.05.23
申请人 SEIKO EPSON CORPORATION 发明人 KANEKO TAKEO
分类号 H01L31/10;H01S3/08;H01S5/00;H01S5/02;H01S5/026;H01S5/042;H01S5/18;H01S5/183;H01S5/42 主分类号 H01L31/10
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