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发明名称
LIQUID DROPLET DISCHARGING DEVICE AND METHOD OF DISCHARGING LIQUID DROPLET, FILM FORMING DEVICE AND METHOD OF FORMING FILM, DEVICE MANUFACTURING METHOD AND ELECTRONIC APPARATUS
摘要
申请公布号
KR100550891(B1)
申请公布日期
2006.02.10
申请号
KR20030073304
申请日期
2003.10.21
申请人
发明人
分类号
B41J2/01;B41J2/045;B41J2/055;G02B5/20;H01L51/50;H05B33/10
主分类号
B41J2/01
代理机构
代理人
主权项
地址
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