ELECTROMECHANICAL RESONATOR AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide an electromechanical resonator wherein a highly accurate narrow gap between a vibrator and an electrode is formed by a simple method. SOLUTION: The gap formed between the vibrator 202 and the electrode 203 is made to be a gap smaller than a minimum gap manufacturable by the semiconductor manufacturing technology by displacing either of the two after the processing, and the vibrator with a greater electrostatic force is excited, or a greater current caused by the vibration is produced. COPYRIGHT: (C)2006,JPO&NCIPI