| 摘要 |
PROBLEM TO BE SOLVED: To provide a practical refractive index modulating type diffraction optical element inexpensively in a simple and easy manner. SOLUTION: In the manufacturing method for an diffraction optical element, a thin film (1) which includes carbon as a main component and has Knoop hardness that is greater than 30 and less than 200 and a refractive index≤1.54, is prepared and a plurality of regions (2a) of the thin film is irradiated with energy beams (4) in order to form a refractive index modulation structure for generating diffraction operation for the thin film and refractive index of these areas is increased. COPYRIGHT: (C)2006,JPO&NCIPI
|
