| 发明名称 |
Non-line-of-sight process for coating complexed shaped structures |
| 摘要 |
Non-line-of-sight process for coating complexed shaped structures of Si-based substrates with protective barrier layers.
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| 申请公布号 |
US2006029733(A1) |
申请公布日期 |
2006.02.09 |
| 申请号 |
US20040914925 |
申请日期 |
2004.08.09 |
| 申请人 |
BHATIA TANIA;BALDWIN NEIL;BARTH ROBERT A;TANG XIA;HOLOWCZAK JOHN E |
发明人 |
BHATIA TANIA;BALDWIN NEIL;BARTH ROBERT A.;TANG XIA;HOLOWCZAK JOHN E. |
| 分类号 |
C23C16/00;B01D57/02;B05D1/36 |
主分类号 |
C23C16/00 |
| 代理机构 |
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代理人 |
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