TEM MEMS DEVICE HOLDER AND METHOD OF FABRICATION

摘要

A device and method for fabricating a device holder for use with a standard holder body of a transmission electron microscope for use with in situ microscopy of both static and dynamic mechanisms. One or more electrical contact fingers is disposed between a baseplate and a frame, with a MEMS device making contact with the electrical contact fingers. A connector is provided to matingly engage the transmission electron microscope and the device holder to couple the device holder to the transmission electron microscope. Once clamped between the baseplate and frame, the electrical contact fingers may be separated from the template.