| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To solve the problems, wherein when a fluorine-based material having superior light resistance is used for a large pellicle film constituting a large pellicle, the large pellicle film sticks to the pattern surface of a mask by air blow to remove foreign matter sticking to the large pellicle film, after the large pellicle has been attached to the mask. <P>SOLUTION: A large pellicle 1 is prepared, by adhering a large pellicle film 4 comprising a fluorine-based polymer with an adhesive 3 to one edge face of a large pellicle frame 2, and successively stacking a pressure-sensitive adhesive material 5 and a protective liner 6 on the other edge face of the large pellicle frame 2. The large pellicle is structured to prevent the large pellicle film 4 from sticking to a mask during blowing air, by appropriately selecting the film thickness of the large pellicle film 4, in accordance with the size of the large pellicle 1. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
