| 摘要 |
PROBLEM TO BE SOLVED: To provide a low cost ultrasonic cleaner which can perform uniform cleaning with a simple structure. SOLUTION: This ultrasonic cleaner comprises at least one cleaning tank storing at least a cleaning liquid, a plurality of ultrasonic vibrators installed in the cleaning tank, an oscillator for driving the vibrators, and a holding fixture for holding a material to be cleaned in the cleaning tank, and the oscillator can periodically change an oscillation frequency, and at least two ultrasonic vibrators among the plurality of the ultrasonic vibrators installed in the cleaning tank have natural frequencies different from each other. The ultrasonic cleaner comprises at least the one cleaning tank storing at least the cleaning liquid, the plurality of ultrasonic vibrators installed in the cleaning tank, the oscillator for driving the vibrators, and the holding fixture for holding the material to be cleaned in the cleaning tank, and comprises an oscillation mechanism for circularly oscillating the holding fixture. COPYRIGHT: (C)2006,JPO&NCIPI
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