Production of a sensor arrangement for detecting radiation comprises forming a carrier membrane on the surface of a substrate, forming an etching access opening in the membrane and further processing

摘要

Production of a sensor arrangement comprises forming a carrier membrane (2) on the surface of a substrate (1), forming an etching access opening in the membrane, forming a cavern (6) in the layer below a predetermined region of the membrane by adding an etching agent through the opening and forming a radiation-acquiring surface (11) on a predetermined section of the membrane over a partial region of the cavern for absorbing radiation and simultaneously forming a connecting site (10) on the membrane for applying a cover to the sensor arrangement by screen printing.