| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for reliably inspecting the quality of a plate. SOLUTION: A piezoelectric plate 208 is mounted on a retaining member 404, an absorber 412 is operated, and the pressure of an internal space 402A in a chamber 402 is gradually decreased to prescribed atmospheric pressure while measuring the atmospheric pressure of the internal space 402A in the chamber 402. When the piezoelectric plate 208 is defective, it is damaged before reaching prescribed atmospheric pressure. When there are holes penetrating the upper and lower surfaces of the piezoelectric plate 208, the fresh air flows in from the holes 210B, and the pressure of the internal space 402A in the chamber 402 is not reduced. The presence or absence of the holes is inspected by a pressure reduction curve for indicating a change in the atmospheric pressure of the internal space 402A. And interference fringes are formed on the piezoelectric plate 208 by using an interferometer marketed as the piezoelectric plate 208 remains deflected, and the interference fringes are observed, thus inspecting the presence or absence of defects. COPYRIGHT: (C)2006,JPO&NCIPI
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