| 摘要 |
<P>PROBLEM TO BE SOLVED: To efficiently remove moisture of a filter and to reduce an inert gas circulation rising time. <P>SOLUTION: The exposure system has a chamber 3 which isolates at least a part of the system body, a blower 10 for circulating an inert gas to the chamber, and a filter 11 for purifying the inert gas. The exposure system is further provided with a filter drying means 25 for creating a dry gas, for circulating the dry gas via the filter not through the chamber. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
