| 摘要 |
Device and method of measuring a position of an irregular surface. The method includes projecting a spot along a first axis onto the irregular surface, focusing an image of the spot along a second axis onto a detector, wherein the second axis is non-coaxially arranged with respect to the first axis, processing signals from the detector, and calculating the position of the irregular surface based on at least one isolated desired frequency component of the signals. This Abstract is not intended to define the invention disclosed in the specification, nor intended to limit the scope of the invention in any way.
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