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发明名称
APPARATUS AND METHOD FOR DRYING WAFERS
摘要
申请公布号
KR100552823(B1)
申请公布日期
2006.02.09
申请号
KR20040110596
申请日期
2004.12.22
申请人
DONGBUANAM SEMICONDUCTOR INC.
发明人
SEO, BO MIN
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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