| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface acoustic wave device having improved moisture resistance, and to provide a manufacturing method thereof. <P>SOLUTION: In a configuration in which a cavity 2 is sealed with a resin 3, a metal foil 4 is formed thereon, thereby improving the air tightness of the cavity 2. The metal foil 4 joins to a metal pattern 11 exposed by cutting the resin 3 and to a package 1. In this way, not only the air tightness of the cavity 2 can be maintained, but also the metal foil 4 can be connected to the ground. Meanwhile, the metal pattern 11 is electrically connected to a foot pattern 7 being an external terminal formed on the rear surface of the package 1 via a via wiring 10 formed in the inside of the external wall of the package 1, a wiring pattern 6 formed on a diamond touch surface, and a via wiring 8 piercing the bottom plate of the package 1. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
