发明名称 CREATION METHOD OF DRAWING DATA, ENERGY BEAM DRAWING METHOD AND ENERGY BEAM DRAWING APPARATUS
摘要 A painting data writing method relates to a method for writing painting data to perform a resizing process of a painting pattern painted by an energy beam. The painting data writing method comprises: connecting apexes of the painting pattern to a plurality of vectors; extracting a pair of vectors, which are positioned on the same straight and includes a different direction, from the vectors; generating a plurality of figures by dividing the painting pattern in a direction which is orthogonal to the pair of vectors between a pair of end points which are adjacent to the extracted vectors; and writing figure data and painting data. The figure data show a shape, a size, and a position of a figure per figure. The painting data define whether or not the resizing process is performed, and resizing information which shows a resizing direction in case of performing the resizing process and resizing amount for each resizing direction.
申请公布号 KR20160090250(A) 申请公布日期 2016.07.29
申请号 KR20160005928 申请日期 2016.01.18
申请人 NUFLARE TECHNOLOGY INC. 发明人 YASHIMA JUN
分类号 H01L21/027;G03F7/00;G03F7/20 主分类号 H01L21/027
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