SYSTEM AND METHOD TO MODIFY SPATIAL RESPONSE OF PATTERN GENERATOR,申请号JP20050216007-传众专利搜索

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发明名称	SYSTEM AND METHOD TO MODIFY SPATIAL RESPONSE OF PATTERN GENERATOR
摘要	<P>PROBLEM TO BE SOLVED: To provide a system and a method to modify the spatial response of a pattern generator. <P>SOLUTION: The method is characterized in that: (a) a material is directed to a layer of a pattern generator device to form a coating on the layer; and (b) at least a part of the material is prevented from reaching the layer in the step (a) so as to generate a trapezoidal profile of reflected light from the coating on the pattern generator. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号	JP2006039566(A)	申请公布日期	2006.02.09
申请号	JP20050216007	申请日期	2005.07.26
申请人	ASML HOLDING NV	发明人	LIPSON MATTHEW;WILKLOW RONALD A
分类号	G03F1/08;C23C14/04	主分类号	G03F1/08
代理机构		代理人
主权项
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